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Analysis: Surface Morphology

Optical Reflectometer

32. OPTICAL REFLECTOMETERModel Filmetrics F 20

General Descriptions:

The Filmetrics F20 is a fast, non-contact optical probe for measuring the thinness of transparent and semi-transparent thin films. The instrument uses a fiber optic probe to measure the spectral reflectance from the sample. The reflected signal from the surface and any interfaces will interfere. This signal will vary depending on the thickness of any surface films. The system software generates a model of the reflectance based on optical properties and compares the model with the measured data.

The technique measures the light that is reflected from a material over a broad spectrum. If the optical properties of refractive index (n) and absorption coefficient (k) are known, the reflectance data can be fitted to models that will estimate thickness parameters.

Film thicknesses from 0.02 up to 50 µm can be measured - i.e. from semiconductor films up to free-standing polymer structures. Multiple layers can also be studied.

Wavelength Range Resolution: 400 – 1000nm

Type of data obtained: Thickness, Reflective Index, Absorption Coefficient and Roughness

Process Description:

Properties of a thin film such as thickness, roughness, and optical constants can be measure by spectral reflectance. The amplitude and periodicity of the reflectance determine these properties. However, if the films are too thin, numerous, or complicated, there would not be sufficient information to resolve a unique solution.

The F-20 system includes measurement of:

   Semiconductors and coatings - SiO2, SiN, photo resist on silicon and III-V compounds, DBRs and VCSELs.

   Coatings - broad-band reflectors and anti-reflection.

   Protective coatings on plastics and flat panel displays layers - cell gap, ITO, polyimide.

Reference: Manual Book for Optical Reflectometer; Model: F20

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Technology (INOR), Universiti Sains Malaysia,
11800 USM, Penang, Malaysia.
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