Model: F21100

General Descriptions:

Small, ideally suited for laboratory use. Intended for applications requiring temperatures:

   Up to 1100°C for manual control bases.

   Up to 1200°C for electronic single set point control bases.

Specifications:

Overall:

   Width : 40.6 cm

   Height : 37.5 cm

   Weight : 9 kg

Chamber:

   Width : 30.5 cm

   Height : 2.5 cm & 5 cm

Electrical Ratings:

   Volts - 230v, Amps -5.4A

   Watts - 1240W, Freq - 50/60Hz

   Phase -1

Specifications:

Intended for applications requiring temperatures:

   Up to 1100°C for manual control bases.

   Up to 1200°C for electronic single set point control bases.

Environmental Conditions:

   Operating: 17°C - 27°C; 20% to 80% relative humidity, non-condensing.

   Altitude limit: 2,000 meters.

   Storage: -25°C to 65°C; 10% to 85% relative humidity.

Reference: Manual Book for Tube Furnace; Model: F21100

Model LENTON VTF1260700

General Descriptions:

This range of furnaces has a maximum operating temperature of 1200°C. Heating is provided by a resistance wire element wound on to the ceramic work tube, which is an integral part of the furnace. Low thermal mass insulation is used throughout for rapid response rates and maximum thermal efficiency and stability. A rugged metal sheathed thermocouple is protected from accidental damage and allows for full use of the work tube bore.

Specifications:

   Tube Diameter: 60mm

   Tube Length: 700mm

   Ramping Temp: 5°C/min

   Vacuum Level: x10-6 torr

   Gas Flow Rate: 4L/min (without vacuum)

   Max Operating Temp: 1200°C

Reference: Manual Book for Annealing Tube Furnace; Model: Lenton VTF/12/60/700

Model Nabertherm R5050012

General:

These compact tabletop tube furnaces with integrated control systems can be used universally for many processes. Equipped with a standard working tube of C 530 ceramic and two fiber plugs, casing manufactured from high grade structured stainless steel .

Specifications:

Tube Diameter: 35mm

Tube Length: 1100mm

Smooth electronic relay switching

Digital PID-controller B 180 with one free programmable ramp, holding temperature and holding time

Type S thermocouple

Max Operating Temp: 1200°C

Reference: Manual Book for Nabertherm Tube Furnace; Model: R50/500/12

Model: Nabertherm R100/750/13

General Descriptions:

These 3 zone tube furnaces can be used universally for many processes. Equipped with 2 units mass flow controller and 3 units electronic temperature controller. casing manufactured from high grade structured stainless steel .

Specifications:

   Max Operating Temp: 1200°C

   3 zone Furnace system

   Type S thermocouple

   Solid state relay for low noise operation

   Working tube of up to 90mm

   Heated length of up to 750mm

   Input Supply of 3 phase, 4.4KW

   Tube Diameter: 75mm

   Tube length: 1450mm

Reference: Manual Book for Nabertherm Tube Furnace; Model: R100/750/13

Model: JIPELEC JetFirst 150

General Descriptions:

The Jipelec JetFirst system is a bench top RTP processor. It is the perfect tool for R&D application. The high reliability allows small-scale production up to 5000 wafers per year. Housed in a bench top frame, the system includes a cold wall reaction chamber with a   maximum 4” or 6” wafer capability and a powerful multi-zone halogen lamp furnace. Lamp array and isolating window are mounted in a rotating top lid, thus allowing full accessibility to the chamber for easy loading/unloading and maintenance operations. The PIMS PC control allows full process monitoring, data acquisition and pyrometer calibration for a large range of substrate. A thermocouple accurately measures temperature of substrate. Open or closed loop temperature control modes are selectable.

System Configuration Specifications:

Pyrometer:

   Automated calibration

   At least type K thermocouple or better performance

Heating element - Linear (e.g. Tungsten-halogen) lamp arrays:

     Lamp calibration and monitoring feature

Process gas supply:

   2 channels with mass flow control (MFC)

Cooling system:

   Water-based

Performance Specifications:

   Wafer size acceptable

       From 2” to about 6”

       Selectable i.e. Susceptor Holder 4” OD w/2” pocket.

   Temperature range:

       From 250 0C to about 1200 0C

   Temperature accuracy, uniformity and repeatability:

       About ±2 0C

   Temperature ramp rate:

       From 1 0C to about 200 0C per second

       Programmable

   Data sampling rate:

       About 100 ms (10Hz) or better

Reference: Rapid Thermal Processor System Model: JIPEL EC JetFirst 150

General Descriptions:

The MetaServ® 250 features variable speed control from 50 to 500 rpm. A built-in bowl wash and drain flush out particles and minimizes build-up of grinding-polishing debris. The adjustable water flow nozzle can be positioned anywhere over the platenand the flow control valve governs the amount of water dispensed. The aluminum platen offers a flat, hard grinding-polishing surface for most medias. A molded protective housing provides corrosion and impact-resistance. The removable bowl splash guard prevents accidental spraying and can be removed for easy platen changing.

Specifications:

   Power : 115/230 VAC, 50/60 Hz, 1-phase

   Platen Diameter : 8" (203mm) or 10" (254mm)

   Platen Speed : 50 to 500 rpm, continuously variable

   Controls : Power on/off, platen on/off, water, platen speed, time, e-stop

   Motor : 4 Hp (200 Watt)

   Water Supply Pressure : 14-28 psi (1-2 bar)

   Water Supply Flow : 0.5 gallon/min. (2 liters/min.)

   Ambient Operating : Temperature: 40-104 °F (5-40° C)

   Humidity: 30-90% Relative Humidity

   Approval Standards : CE Marked, EC Applicable Directives

Complete with:

   No. 40-4061 8" (203mm) dia. Aluminium platen

   No. 30-2008 8" (203mm) dia. Paper Holding Band

   Instruction Manual

Accessories (for Polishing purpose):

   No. 41-2739-608-001 APEX M, Magnetic Disc, 8" (203mm) dia.

   No. 16-2072 APEX Magnomet Metallic Plate, 8" (203mm) dia. (5pc/pack)

General Descriptions:

   No. 60-10059-230 VECTOR LC 250 Power Head for Semi-Auto Operation

The Vector® LC 250 Power Head upgrades the MetaServ® 250 Grinder-Polishers from manual to semi-automatic operation, increasing specimen consistency. The Vector® LC 250 Power Head is an easy to operate, economical power head with basic features for low volume applications. Single sample pressure prepares one to four samples and allows pressure to be tailored for each sample. It has mechanical sample loading and head positioning which does not require the use of air pressure. The front control panel features simple to operate controls including an analog pressure setting display and power switch.

Specifications:

   Configuration : Mechanical-driven head mounted to grinder/polisher base via rigid post

   Operation : Single force sample loading, No pneumatically applied

   Sample Capacity : Single : 1 to 4

   Sample Sizes : 25mm, 1", 30mm, 1-1/4", 1-1/2" and 40mm

   Controls : An analog pressure setting display and power switch.

   Water On/Off : Nil

   Sample Force : Individual : 0 - 11 lbs (0 to 50N)

   Head Speed : 60 rpm

   Mains Power : Operation on 230VAC, 50/60Hz, 1 phase

   Motor : 1/20 HP (32 Watt)

   Control Voltage : 12 VDC

   Dimension : 190W x 381D x 406H mm (7-1/2"W x 15"D x 16"H)

Complete with:

   No. 60-10061 4 x 1-1/4" (32mm) dia. samples for Single Force Specimen Holder

   No. 60-9005 Single force drive adapter

   Instruction Manual

Reference: Brochure for Grinder/Polishing Machine; Model: Metaserv 250, BUEHLER

Model 9 Variable Speed

General Descriptions:

The Ball Mill model 9 is designed for use with Ball Mill Jars of up to 1 liters. It is fitted with a speed controller giving a roller speed from 0-350RPM and an interlocked polycarbonate guard.

Specifications:

   Motor: 50w

   Electricity Supply*: 230v/1ph/50hz

   Weight: 14kg

   Height: 210mm

   Depth: 250mm

   Width: 400mm

   Roll Length: 190mm

   Guard: std

   Pot Capacity (liter): 0.5-1.0

   Fireproof: N/A

   Roll Speed (rpm): 0-350

   Tiers: 1

   Rollers: 2

   Adjustable rollers: No

Reference: Manual Book for Ball Mill, Model: 9 Variable Speed

Model ATV RV-129

General Descriptions:

Precision diamond scriber for manual scribing.

System features:

Vacuum chuck – 8” diameter

Fine adjustable in X and angle of 0.05 deg/div

Digital gauge for X: 0 – 190mm

Resolution – 10 micrometer

25X cross hair microscope which is lined up with the diamond tip to be   used as a reference for further scribes

Max. scribe length – 220mm

Max. X travel – 190 mm

Max. Y travel – 220mm

Examples of materials: Si and glass

Reference: manual Book for Diamond Scriber; Model: ATV RV-129

Model SC-1000 Ion Mill

General Descriptions:

The SC-1000 is equipped with high and low energy ion sources. Rapid slope cutting with the high-energy ion gun provides cross-sectional SEM sample of highest quality even from difficult material. The system also provides an ion milling based solution for improving and cleaning of mechanically polished SEM sample and preparation of damge-free surfaces for Electron Back Scatter Diffraction (EBSD) study. The SC-1000 is a fully automated system. The control software sets the parameters of the milling process according to the pre-programmed recepies, determines and adjust the optimal gas amount by the motorized needle valve, then executes the milling process and terminates it completely automatically.

Applications:

Many different materials systems e.g. Si and Sapphire have been prepared for high resolution TEM or STEM analysis using a combination of mechanical thinning, ion milling using the Model 1010. The achievable milling rate will be a function of material type, specimen geometry and milling conditions. Extractor voltage and current should be chosen to avoid damaging a specimen through amorphization, ion implantation, or overheating. It is recommended that liquid nitrogen cooling always be used to avoid overheating.

Ion sources:

Two ion guns:

focused high-energy ion gun operating from 2keV to 10keV focused low-energy ion gun in the range of 100eV to 2keV continuously and independently adjustable milling energy

Beam current density:

max. 100mA/cm² for focused high-energy ion gun max. 10mA/cm² for focused low-energy ion gun

Sputtering rate:

150 µm/hour on Si at 30º for focused high-energy ion gun 28 µm/hour on Si at 30º for focused low-energy ion gun

Sample stage:-

Sample size:

slope cutting sample holder (available with 30o , 45o , 60o , 90o tilted platforms)

for 30o , 45o , 60o holders: max. 20 mm (l) x 16 mm (w) x 7 mm (th)

for 90o holder: max. 20 mm (l) x 16 mm (w) x 5.5 mm (th)

Sample holder for surface cleaning (EBSD) using 3 different head type:

flat head type: max. Ø36 mm x 0-5.5 mm

standard type: max. Ø26 mm x 3-14 mm

hollow type: max. Ø24 mm x 13-23 mm

Sample positioning:

high precision sample positioning for slope cutting: with 2 µm accuracy

Sample tilting:

0º to 30º in 0.1º increments

Sample rotation:

in-plane rotation, 360º

Sample oscillation:

in-plane oscillation from +10 to +90º

Vacuum system:

oil-free diaphragm and turbomolecular pumps with combined (Pirani/Penning) vacuum gauge

Gas supply system:

99.999% purity argon high-precision working gas flow control with motorized needle valve

Imaging system: high resolution CMOS camera with manual zoom video lens of 50-400x magnification

Computer control: easy-to-use graphical interface, automated ion source setup, milling parameter setting and operation control

Reference: Manual Book for SEMprep SC-1000