INOR Laboratory Analysis Service Charges

Metal Organic Chemical Vapor Depositor [MOCVD]

No. Type of services INOR Co-Supervision Other USM’s school IPTA/IPTS Industry
1. MOCVD run (per hour) for requested sample (Max: 4” wafer) RM 1,000 RM 1,500 RM 2,000 RM 3,000
* All charges does not include 10% Sales and Services Tax (SST).

Fabrication Analysis

No. Type of services INOR Co-Supervision Other USM’s school IPTA/IPTS Industry
1. 3-zone Furnace (per hour, max temp 1,100 deg. Cel.)
a.) Metalization RM 50 RM 80 RM 100 RM 130
b.) Oxidation RM 80 RM 100 RM 120 RM 150
2. Single zone furnace (per hour, max temp 1,100 deg. Cel.)
a.) Metalization RM 30 RM 50 RM 80 RM 120
b.) Oxidation RM 50 RM 80 RM 100 RM 130
3. 3-zone furnace with NH3 cracker (Nitridation) RM 100 RM 150 RM 200 RM 350
(per hour, max temp 1,100 deg. Cel.)
4. Degas Vacuum System (per hour) RM 20 RM 30 RM 50 RM 80
5. E-Beam Evaporator (per run, max 2 hours)
a.) w/o source material and crucible RM 200 RM 350 RM 380 RM 500
b.) With material & crucible Additional charge depend on material & thickness
6. Inductive Couple Plasma Etching System (ICP)
(per run, max 2 hours)
a.) Using Cl & BCl3 (eg. GaN) RM 250 RM 350 RM 450 RM 600
b.) Other gases except Cl & BCl3 (eg. Si, ITO, ZnO) RM 150 RM 250 RM 350 RM 500
7. Rapid Thermal Processor System (RTP) (per run, max 1 hour) RM 80 RM 100 RM 150 RM 300
8. UV-Ozone Cleaner (per run) RM 10 RM 10 RM 20 RM 30
9. Hotplate with Stirrer (per hour) RM 10 RM 10 RM 20 RM 30
10. Glove Box (Vacuum/Nitrogen) (per hour) RM 20 RM 30 RM 50 RM 80
11. Optical Microscope (per hour) RM 10 RM 10 RM 20 RM30
12. Spin Coater (per hour) RM 10 RM 10 RM 20 RM 30
13. Laminar Flow (per hour) RM 30 RM 50 RM 100 RM 120
14. Fume Hood (per hour) RM 10 RM 10 RM 20 RM 30
15. Direct write using maskless lithography (complete process)
(per hour)
a.) Sample with pre-coat PR RM 200 RM 250 RM 300 RM 500
* maskless lithography, developer (AZ300), optical microscope,
UV-Ozone Cleaner)
b.) Sample without pre-coat PR RM 300 RM 350 RM 400 RM 600
* HMDS, PR (limited to AznLoF2020), spinner, hot plate,
ULPA laminar flow bench, maskless lithography, developer
(AZ300), optical microscope, UV-Ozone Cleaner)
* All charges does not include 10% Sales and Services Tax (SST).

Characterization Analysis

No. Type of services INOR Co-Supervision Other USM’s school IPTA/IPTS Industry
1. Probe Station w/o Sample Prep (per sample)
a.) CV Measurement RM 50 RM 80 RM 100 RM 150
b.) IV Measurement RM 50 RM 80 RM 100 RM 150
• With Sample Prep (add on) Additional charge depend on material
2. Photoluminescence (PL) RM 50 RM 80 RM 100 RM 150
3. Electroluminescence (EL) RM 50 RM 80 RM 100 RM 150
4. X-Ray Diffraction System (XRD)
a.) Powder/Phase Analysis
(i) Normal scan RM 100 RM 120 RM 150 RM 300
(ii) Low noise background scan (Small quantity powder) RM 120 RM 150 RM 180 RM 350
b.) Thin film
(i) Grazing Incidence Diffaction (GID) RM 120 RM 150 RM 180 RM 350
(ii) X-ray Reflectivity (XRR) RM 120 RM 150 RM 180 RM 350
c.) Thin film with High Resolution (HR) measurement
(i) Rocking curve (RC) RM 150 RM 200 RM 300 RM 500
(ii) Double-axis/Triple-Axis HRXRD
• Standard Range (5 deg) RM 150 RM 200 RM 300 RM 500
• Extended Range (8 deg) RM 150 RM 200 RM 300 RM 500
(iii) Reciprocal Space Mapping (RSM)
• Normal Scan RM 150 RM 200 RM 300 RM 500
• Ultra Fine Scan RM 500 RM 1,000 RM 1,500 RM 2,000
* All charges does not include 10% Sales and Services Tax (SST).

Lab Usage & Consultation Fee

No. Type of services INOR Co-Supervision Other USM’s school IPTA/IPTS Industry
1. Lab usage fee (per person, per year)* RM 1,000 RM 2,000
* Limit to the use of fume hood, basic consumables, and basic
equipments (eg. hotplate, UV-Ozone cleaner, etc)
2. Consultation/analysis fee Case By Case
3. Contract Services/Projects Case By Case
* All charges does not include 10% Sales and Services Tax (SST).

Laboratory Request Form

For enquiry and booking, please contact Dr Mundzir Abdullah through mundzir@usm.my,
or +6046535648.

Institute of Nano Optoelectronics Research and
Technology (INOR), Universiti Sains Malaysia,
11800 USM, Penang, Malaysia.
T:+604-653 5637/5638
F:+604-653 5639

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