INOR Laboratory Analysis Service Charges
Metal Organic Chemical Vapor Depositor [MOCVD]
| No. | Type of services | INOR Co-Supervision | Other USM’s school | IPTA/IPTS | Industry |
| 1. | MOCVD run (per hour) for requested sample (Max: 4” wafer) | RM 1,000 | RM 1,500 | RM 2,000 | RM 3,000 |
| * All charges does not include 10% Sales and Services Tax (SST). | |||||
Fabrication Analysis
| No. | Type of services | INOR Co-Supervision | Other USM’s school | IPTA/IPTS | Industry |
| 1. | 3-zone Furnace (per hour, max temp 1,100 deg. Cel.) | ||||
| a.) Metalization | RM 50 | RM 80 | RM 100 | RM 130 | |
| b.) Oxidation | RM 80 | RM 100 | RM 120 | RM 150 | |
| 2. | Single zone furnace (per hour, max temp 1,100 deg. Cel.) | ||||
| a.) Metalization | RM 30 | RM 50 | RM 80 | RM 120 | |
| b.) Oxidation | RM 50 | RM 80 | RM 100 | RM 130 | |
| 3. | 3-zone furnace with NH3 cracker (Nitridation) | RM 100 | RM 150 | RM 200 | RM 350 |
| (per hour, max temp 1,100 deg. Cel.) | |||||
| 4. | Degas Vacuum System (per hour) | RM 20 | RM 30 | RM 50 | RM 80 |
| 5. | E-Beam Evaporator (per run, max 2 hours) | ||||
| a.) w/o source material and crucible | RM 200 | RM 350 | RM 380 | RM 500 | |
| b.) With material & crucible | Additional charge depend on material & thickness | ||||
| 6. | Inductive Couple Plasma Etching System (ICP) | ||||
| (per run, max 2 hours) | |||||
| a.) Using Cl & BCl3 (eg. GaN) | RM 250 | RM 350 | RM 450 | RM 600 | |
| b.) Other gases except Cl & BCl3 (eg. Si, ITO, ZnO) | RM 150 | RM 250 | RM 350 | RM 500 | |
| 7. | Rapid Thermal Processor System (RTP) (per run, max 1 hour) | RM 80 | RM 100 | RM 150 | RM 300 |
| 8. | UV-Ozone Cleaner (per run) | RM 10 | RM 10 | RM 20 | RM 30 |
| 9. | Hotplate with Stirrer (per hour) | RM 10 | RM 10 | RM 20 | RM 30 |
| 10. | Glove Box (Vacuum/Nitrogen) (per hour) | RM 20 | RM 30 | RM 50 | RM 80 |
| 11. | Optical Microscope (per hour) | RM 10 | RM 10 | RM 20 | RM30 |
| 12. | Spin Coater (per hour) | RM 10 | RM 10 | RM 20 | RM 30 |
| 13. | Laminar Flow (per hour) | RM 30 | RM 50 | RM 100 | RM 120 |
| 14. | Fume Hood (per hour) | RM 10 | RM 10 | RM 20 | RM 30 |
| 15. | Direct write using maskless lithography (complete process) | ||||
| (per hour) | |||||
| a.) Sample with pre-coat PR | RM 200 | RM 250 | RM 300 | RM 500 | |
| * maskless lithography, developer (AZ300), optical microscope, | |||||
| UV-Ozone Cleaner) | |||||
| b.) Sample without pre-coat PR | RM 300 | RM 350 | RM 400 | RM 600 | |
| * HMDS, PR (limited to AznLoF2020), spinner, hot plate, | |||||
| ULPA laminar flow bench, maskless lithography, developer | |||||
| (AZ300), optical microscope, UV-Ozone Cleaner) | |||||
| * All charges does not include 10% Sales and Services Tax (SST). | |||||
Characterization Analysis
| No. | Type of services | INOR Co-Supervision | Other USM’s school | IPTA/IPTS | Industry |
| 1. | Probe Station w/o Sample Prep (per sample) | ||||
| a.) CV Measurement | RM 50 | RM 80 | RM 100 | RM 150 | |
| b.) IV Measurement | RM 50 | RM 80 | RM 100 | RM 150 | |
| • With Sample Prep (add on) | Additional charge depend on material | ||||
| 2. | Photoluminescence (PL) | RM 50 | RM 80 | RM 100 | RM 150 |
| 3. | Electroluminescence (EL) | RM 50 | RM 80 | RM 100 | RM 150 |
| 4. | X-Ray Diffraction System (XRD) | ||||
| a.) Powder/Phase Analysis | |||||
| (i) Normal scan | RM 100 | RM 120 | RM 150 | RM 300 | |
| (ii) Low noise background scan (Small quantity powder) | RM 120 | RM 150 | RM 180 | RM 350 | |
| b.) Thin film | |||||
| (i) Grazing Incidence Diffaction (GID) | RM 120 | RM 150 | RM 180 | RM 350 | |
| (ii) X-ray Reflectivity (XRR) | RM 120 | RM 150 | RM 180 | RM 350 | |
| c.) Thin film with High Resolution (HR) measurement | |||||
| (i) Rocking curve (RC) | RM 150 | RM 200 | RM 300 | RM 500 | |
| (ii) Double-axis/Triple-Axis HRXRD | |||||
| • Standard Range (5 deg) | RM 150 | RM 200 | RM 300 | RM 500 | |
| • Extended Range (8 deg) | RM 150 | RM 200 | RM 300 | RM 500 | |
| (iii) Reciprocal Space Mapping (RSM) | |||||
| • Normal Scan | RM 150 | RM 200 | RM 300 | RM 500 | |
| • Ultra Fine Scan | RM 500 | RM 1,000 | RM 1,500 | RM 2,000 | |
| * All charges does not include 10% Sales and Services Tax (SST). | |||||
Lab Usage & Consultation Fee
| No. | Type of services | INOR Co-Supervision | Other USM’s school | IPTA/IPTS | Industry |
| 1. | Lab usage fee (per person, per year)* | RM 1,000 | RM 2,000 | ||
| * Limit to the use of fume hood, basic consumables, and basic | |||||
| equipments (eg. hotplate, UV-Ozone cleaner, etc) | |||||
| 2. | Consultation/analysis fee | Case By Case | |||
| 3. | Contract Services/Projects | Case By Case | |||
| * All charges does not include 10% Sales and Services Tax (SST). | |||||
Laboratory Request Form
| Title | Size | Download |
|---|---|---|
| Characterization Analysis Request Form | 221.36 KB | Download Preview |
| Fabrication Process Request Form | 226.29 KB | Download Preview |
| MOCVD Grown Sample Request Form | 218.88 KB | Download Preview |
| XRD Analysis Request Form | 220.34 KB | Download Preview |
| Internal Substrate Request Form [CREST] USM | 201.37 KB | Download Preview |
| Precious Materials Usage Request Form | 120.12 KB | Download Preview |
| MOCVD Grown Sample Request Form | 95.30 KB | Download |
| Characterization Analysis Request Form | 95.80 KB | Download |
| Fabrication Process Request Form | 96.38 KB | Download |
| XRD Analysis Request Form | 95.47 KB | Download |
| Precious Materials Usage Request Form | 36.55 KB | Download |
| Internal Substrate Request Form [CREST] USM | 36.23 KB | Download |