• Mon - Fri 8:10 - 17:10

INOR Laboratory Analysis Service Charges

No. Type of services INOR Co-Supervision Other USM’s school IPTA/IPTS Industry
MOCVD Laboratory *For further inquiry and booking, please email to anasahmad@usm.my
1 MOCVD run (per hour) for requested sample (Max: 4” wafer) 1000 1500 2000 3000
2 Standard sample (In stock) Please refer to the I-Shop brochure.
Characterization Laboratory *For further inquiry and booking, please email to azraai@usm.my
3 Probe Station w/o Sample Prep (per sample)
a.)   CV Measurement 50 80 100 150
b.)   IV Measurement 50 80 100 150
· With Sample Prep (add on) Additional charge depend on material
4 Photoluminescence (PL) 50 80 100 150
5 Electroluminescence (EL) 50 80 100 150
6 X-Ray Diffraction System (XRD)
a.)  Powder/Phase Analysis
(i).  Normal scan 100 120 150 300
(ii).  Low noise background scan (Small quantity powder) 120 150 180 350
b.)  Thin film
(i).   Grazing Incidence Diffaction (GID) 120 150 180 350
(ii).  X-ray Reflectivity (XRR) 120 150 180 350
c.) Thin film with High Resolution (HR) measurement
(i).   Rocking curve (RC) 150 200 300 500
(ii).  Double-axis/Triple-Axis HRXRD
· Standard Range (5 deg) 150 200 300 500
· Extended Range (8 deg) 180 300 450 750
(iii).Reciprocal Space Mapping (RSM)
· Normal Scan 150 200 300 500
· Ultra Fine Scan 500 1000 1500 2000
Fabrication Laboratory *For further inquiry and booking, please email to anasahmad@usm.my
7 3-zone Furnace (per hour, max temp 11000C)
a.)   Metalization 50 80 100 130
b.)   Oxidation 80 100 120 150
8 Single zone furnace (per hour, max temp 11000C)
a.)  Metalization 30 50 80 120
b.)  Oxidation 50 80 100 130
9 3-zone furnace with NH3 cracker (Nitridation) (per hour, max temp 11000C) 100 150 200 350
10 Degas Vacuum System (per hour) 20 30 50 80
11 E-Beam Evaporator (per run, max 2 hours)
a.)    w/o source material and crucible 200 350 380 500
b.)    With material & crucible Additional charge depend on material & thickness
12 Inductive Couple Plasma Etching System (ICP) (per run, max 2 hours)
a.) Using Cl & BCl3 (eg. GaN) 250 350 450 600
b.) Other gases except Cl & BCl3 (eg. Si, ITO, ZnO) 150 250 350 500
13 Rapid Thermal Processor System (RTP) (per run, max 1 hour) 80 100 150 300
14 UV-Ozone Cleaner (per run) 10 10 20 30
15 Hotplate with Stirrer (per hour) 10 10 20 30
16 Glove Box (Vacuum/Nitrogen) (per hour) 20 30 50 80
17 Optical Microscope (per hour) 10 10 20 30
18 Spin Coater (per hour) 10 10 20 30
19 Laminar Flow (per hour) 30 50 100 120
20 Fume Hood (per hour) 10 10 20 30
21 Direct write using maskless lithography (complete process) (per hour)
a.)    Sample with pre-coat PR 200 250 300 500
*maskless lithography, developer (AZ300), optical microscope, UV-Ozone Cleaner)
b.)    Sample without pre-coat PR 300 350 400 600
*HMDS, PR (limited to AznLoF2020), spinner, hot plate, ULPA laminar flow bench, maskless lithography, developer (AZ300), optical microscope, UV-Ozone Cleaner)
Lab Usage/Consultation Fee *For further inquiry and booking, please email to mundzir@usm.my INOR Co-supervision Industry
22 Lab usage fee (per person, per year)* 2000 -
* Limit to the use of fume hood, basic consumables, and basic equipments (eg. hotplate, UV-Ozone cleaner, etc)
23 Consultation/analysis fee Case By Case
24 Contract Services/Projects Case By Case

Laboratory Request Form

  • Characterization Analysis Request Form [Word]

  • Characterization Analysis Request Form [PDF]

  • Fabrication Process Request Form [Word]

  • Fabrication Process Request Form [PDF]

  • Internal Substrate Request Form (CREST) USM [Word]

  • Internal Substrate Request Form (CREST) USM [PDF]

  • MOCVD Grown Sample Request Form [Word]

  • MOCVD Grown Sample Request Form [PDF]

  • Precious Materials Usage Request Form [Word]

  • Precious Materials Usage Request Form [PDF]

  • XRD Analysis Request Form [Word]

  • XRD Analysis Request Form [PDF]

Institute of Nano Optoelectronics Research and
Technology (INOR), Universiti Sains Malaysia,
11800 USM, Penang, Malaysia.
T:+604-653 5637/5638
F:+604-653 5639

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