Maskless/Mask Aligner
Equipment for lithography process includes maskless lithography/ mask aligner, spin coater, hot plate, optical microscope, UV ozone cleaner, laminar flow and developer bench. Chemicals for lithography process that are available in INOR fabrication laboratory:
1) Hexamethyldisilazane (HMDS) 2) AZnLOF2035 3) AZnLOF2020 4) Developer AZ326 MIF 5) Technistrip MLO07 6) Chrome etchant 7) Remover 100 8) NMP
Please feel free to contact me (017- 688 3034) if you have any questions or concerns.