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MOCVD Laboratory

For further inquiry and booking
Send an email
Type of services
MOCVD run (per hour) for requested sample (Max: 4” wafer)
Standard sample (In stock)
INOR Co-SupervisionOther USM’s school
RM 1000
RM 2000
Please
refer to
IPTA/IPTSIndustry
RM 2000
RM 3000
the
I-Shop brochure.
I-Shop brochure.

Characterization Laboratory

For further inquiry and booking
Send an email
Type of services
Probe Station w/o Sample Prep
(per sample)
a.) CV Measurement
b.) IV Measurement
· With Sample Prep (add on)
Photoluminescence (PL)
Electroluminescence (EL)
X-Ray Diffraction System (XRD)
a.) Powder/Phase Analysis
(i). Normal scan
(ii). Low noise background scan
b.) Thin film
(i). Grazing Incidence Diffaction
(ii). X-ray Reflectivity (XRR)
c.) Thin film with High Resolution measurement
(i). Rocking curve (RC)
(ii). Double-axis/Triple-Axis HRXRD
· Standard Range (5 deg)
· Extended Range (8 deg)
iii).Reciprocal Space Mapping (RSM)
· Normal Scan
· Ultra Fine Scan
INOR Co-SupervisionOther USM’s school

RM 50

RM 80
RM 50
RM 80
Additional
charge
RM 50
RM 80
RM 50
RM 80
-
-
RM 100
RM 120
RM 120
RM 150
-
-
RM 120
RM 150
RM 150
RM 200
RM 350
RM 400
RM 380
RM 500
RM 150
RM 200
Kindly
consult
Kindly
consult
IPTA/IPTSIndustry

RM 100

RM 150
RM 100
RM 150
depend on
material
RM 100
RM 150
RM 100
RM 150
-
-
RM 150
RM 300
RM 180
RM 350
-
-
RM 180
RM 350
RM 300
RM 500
RM 500
RM 700
RM 650
RM 950
RM 300
RM 500
with
us
with
us

Fabrication Laboratory

For further inquiry and booking
Send an email
Type of services
3-zone Furnace
(per hour, max temp 11000C)
a.) Metalization
b.) Oxidation
Single zone furnace
(per hour, max temp 11000C)
a.) Metalization
b.) Oxidation
3-zone furnace with NH3 cracker
(per hour, max temp 11000C)
Degas Vacuum System
(per hour)
E-Beam Evaporator
(per run, max 2 hours)
a.) w/o source material & crucible
b.) with material & crucible
Inductive Couple Plasma Etching System
(per run, max 2 hours)
a.) Using Cl & BCl3 (eg. GaN)
b.) Other gases except Cl & BCl3
(eg. Si, ITO, ZnO)
Rapid Thermal Processor System
(per run, max 1 hour)
UV-Ozone Cleaner (per run)
Hotplate with Stirrer (per hour)
Glove Box (Vacuum/Nitrogen) (per hour)
Optical Microscope (per hour)
Spin Coater (per hour)
Laminar Flow (per hour)
Fume Hood (per hour)
Direct write using maskless lithography
(complete process) (per hour)
a.) Sample with pre-coat PR
*maskless lithography, developer
(AZ300), optical microscope,
UV-Ozone Cleaner)
b.) Sample without pre-coat PR
*HMDS, PR (limited to AznLoF2020),
spinner, hot plate,
ULPA laminar flow bench,
maskless lithography,
developer (AZ300),
optical microscope,
UV-Ozone Cleaner)
INOR Co-SupervisionOther USM’s school

RM 50

RM 80
RM 80
RM 100

RM 50

RM 80
RM 50
RM 80

RM 100

RM 150

RM 50

RM 80

RM 200

RM 350
Additional charge
depend on

RM 250

RM 350

RM 150

RM 250

RM 80

RM 100
RM 50
RM 80
RM 50
RM 80
RM 50
RM 80
RM 50
RM 80
RM 50
RM 80
RM 50
RM 80
RM 50
RM 80


Kindly



consult




Kindly



consult
IPTA/IPTSIndustry

RM 100

RM 130
RM 120
RM 150

RM 100

RM 130
RM 100
RM 130

RM 200

RM 350

RM 100

RM 130

RM 380

RM 500
material &
thickness

RM 450

RM 600

RM 350

RM 500

RM 150

RM 300
RM 100
RM 130
RM 100
RM 130
RM 100
RM 130
RM 100
RM 130
RM 100
RM 130
RM 100
RM 130
RM 100
RM 130


with



us




with



us

Lab Usage/Consultation Fee

For further inquiry and booking
Send an email
Type of services
Lab usage fee (per person, per year)*
* Limit to the use of fume hood, basic consumables, and basic equipments
(eg. hotplate, UV-Ozone cleaner, etc)
Consultation/analysis fee
Contract Services/Projects
INOR Co-SupervisionOther USM’s school


RM 2000


-
case
by
case
by
IPTA/IPTSIndustry


-


-
case
case