• Mon - Fri 8:10 - 17:10
  1. Select Time slot
  2. Login / Register
  3. Check-in
  4. Confirm
Yellow Room

We provide fabrications of electronics and optoelectronic device. We also accept for custom parameter.

May   2024
Mon Tue Wed Thu Fri Sat Sun
01
02
03
04
05
06
07
08
09
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
Booking info
Your booking is empty. To make a booking, please select the date in the calendar, and then select service and booking slot below.
Wet Benches (10/05/2024)
01:00 hours  |  1

Please turn off the fume hood once your work finished.

Yellow Room
Yellow Room, Block A, Ground Floor, No. 10, sains@usm, Persiaran Bukit Jambul, , Bayan Lepas, Pulau Pinang, Malaysia
Contact name: Dr. Mundzir Abdullah
Contact email: mundzir@usm.my
Wet Benches
Unavailable time:
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1

Reviews (0)

Lithography Process (10/05/2024)
01:00 hours  |  1

Maskless/Mask Aligner

Equipment for lithography process includes maskless lithography/ mask aligner, spin coater, hot plate, optical microscope, UV ozone cleaner, laminar flow and developer bench.
Chemicals for lithography process that are available in INOR fabrication laboratory:

1) Hexamethyldisilazane (HMDS)
2) AZnLOF2035
3) AZnLOF2020
4) Developer AZ326 MIF
5) Technistrip MLO07
6) Chrome etchant
7) Remover 100
8) NMP

Please feel free to contact me (017- 688 3034) if you have any questions or concerns.

Yellow Room
Yellow Room, Block A, Ground Floor, No. 10, sains@usm, Persiaran Bukit Jambul, , Bayan Lepas, Pulau Pinang, Malaysia
Contact name: Dr. Mundzir Abdullah
Contact email: mundzir@usm.my
Lithography Process
Unavailable time:
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1
    -  Avail: 1

Other information


Direct write
Sample with pre-coat PR
Sample without pre-coat PR

Reviews (0)

Institute of Nano Optoelectronics Research and
Technology (INOR), Universiti Sains Malaysia,
11800 USM, Penang, Malaysia.
T:+604-653 5637/5638
F:+604-653 5639

© 2017 INOR. All Rights Reserved. Designed By INOR.